Semiconductor device including different nitride regions and method for manufacturing same

ABSTRACT

According to one embodiment, a semiconductor device includes first to third electrodes, first to third nitride regions, and first and second insulating films. The first nitride region includes Al x1 Ga 1−x1 N, and includes first and second partial regions, a third partial region between the first and second partial regions, a fourth partial region between the first and third partial regions, and a fifth partial region between the third and second partial regions. The first nitride region includes first to fifth partial regions. The second nitride region includes Al x2 Ga 1−x2 N, and sixth and seventh partial regions. At least a portion of the third electrode is between the sixth and seventh partial regions. The first insulating film includes silicon and oxygen and includes first and second insulating regions. The third nitride region includes Al x3 Ga 1−x3 N, and first to seventh portions. The second insulating film includes silicon and oxygen and includes third to seventh insulating regions.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of and claims benefit under U.S.C. §120 to U.S. application Ser. No. 17/407,851 filed Aug. 20, 2021, whichis a divisional of and claims benefit under U.S.C. § 120 to U.S.application Ser. No. 16/569,319 filed Sep. 12, 2019, which is based uponand claims the benefit of priority under 35 U.S.C. § 119 from JapanesePatent Application No. 2019-046606, filed Mar. 14, 2019, the entirecontents of each of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a semiconductor deviceand a method for manufacturing the same.

BACKGROUND

For example, there is a semiconductor device that uses a nitridesemiconductor. It is desirable to improve the characteristics of thesemiconductor device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A and FIG. 1B are schematic cross-sectional views illustrating asemiconductor device according to a first embodiment;

FIG. 2A to FIG. 2C are schematic views illustrating the semiconductordevice according to the first embodiment;

FIG. 3A to FIG. 3D illustrate X-ray diffraction pattern images of thesemiconductor device according to the first embodiment;

FIG. 4 is a graph illustrating characteristics of the semiconductordevice;

FIG. 5 is a graph illustrating characteristics of the semiconductordevice;

FIG. 6A to FIG. 6D are graphs illustrating characteristics of thesemiconductor device;

FIG. 7 is a flowchart illustrating the method for manufacturing thesemiconductor device according to the second embodiment;

FIG. 8A to FIG. 8D are schematic cross-sectional views in order of theprocesses, illustrating the method for manufacturing the semiconductordevice according to the second embodiment; and

FIG. 9A to FIG. 9D are schematic cross-sectional views in order of theprocesses, illustrating the method for manufacturing the semiconductordevice according to the second embodiment.

DETAILED DESCRIPTION

According to one embodiment, a semiconductor device includes first tothird electrodes, first to third nitride regions, first and secondinsulating films, and first and second insulating films. The firstnitride region includes Al_(x1)Ga_(1−x1)N (0≤x1≤1) and includes a firstpartial region, a second partial region, a third partial region betweenthe first partial region and the second partial region, a fourth partialregion between the first partial region and the third partial region,and a fifth partial region between the third partial region and thesecond partial region. A first direction from the first partial regiontoward the first electrode crosses a second direction from the firstelectrode toward the second electrode. A direction from the secondpartial region toward the second electrode is aligned with the firstdirection. The second nitride region includes Al_(x2)Ga_(1−x2)N (0<x2≤1and x1<x2) and includes a sixth partial region and a seventh partialregion. A direction from the fourth partial region toward the sixthpartial region is aligned with the first direction. A direction from thefifth partial region toward the seventh partial region is aligned withthe first direction. A direction from the third partial region towardthe third electrode is aligned with the first direction. At least aportion of the third electrode is between the sixth partial region andthe seventh partial region in the second direction. The first insulatingfilm includes silicon and nitrogen and includes a first insulatingregion and a second insulating region. The third nitride region includesAl_(x3)Ga_(1−x3)N (0<x3≤1 and x1<x3) and includes first to seventhportions. The first portion is between the third electrode and the thirdpartial region. The second portion is between the third electrode andthe fourth partial region. The third portion is between the thirdelectrode and the fifth partial region. The fourth portion is betweenthe third electrode and the sixth partial region. The fifth portion isbetween the third electrode and the seventh partial region. The firstinsulating region is between the sixth portion and the sixth partialregion. The second insulating region is between the seventh portion andthe seventh partial region. The second insulating film includes siliconand oxygen and includes third to seventh insulating regions. The thirdinsulating region is between the first portion and the third electrode.The fourth insulating region is between the fourth portion and the thirdelectrode. The fifth insulating region is between the fifth portion andthe third electrode. The sixth portion is between the sixth insulatingregion and the first insulating region. The seventh portion is betweenthe seventh insulating region and the second insulating region.

According to one embodiment, a method for manufacturing a semiconductordevice is disclosed. The method can include preparing a stacked bodyincluding a first nitride region, a second nitride region, and a firstinsulating film. The first nitride region includes Al_(x1)Ga_(1−x1)N(0≤x1<1). The second nitride region includes Al_(x2)Ga_(1−x2)N (0<x2≤1and x1<x2). The second nitride region is provided between the firstnitride region and the first insulating film. The method can includeexposes a portion of the first nitride region at a bottom portion of arecess by forming the recess in the stacked body by removing a portionof the stacked body from the first insulating film side. The method canforming a third nitride region at the first insulating film, at a sidesurface of the second nitride region, and at the first nitride regionexposed at the bottom portion of the recess. The third nitride regionincludes Al_(x3)Ga_(1−x3)N (0<x3≤1 and x1<x3). The method can includeforming a second insulating film after the forming of the third nitrideregion, and forming first to third electrodes after the forming of thesecond insulating film. A second direction from the first electrodetoward the second electrode crosses a first direction from the firstnitride region toward the second nitride region. A position in thesecond direction of the third electrode is between a position in thesecond direction of the first electrode and a position in the seconddirection of the second electrode. At least a portion of the thirdelectrode is in a remaining space of the recess.

Various embodiments are described below with reference to theaccompanying drawings.

The drawings are schematic and conceptual; and the relationships betweenthe thickness and width of portions, the proportions of sizes amongportions, etc., are not necessarily the same as the actual values. Thedimensions and proportions may be illustrated differently amongdrawings, even for identical portions.

In the specification and drawings, components similar to those describedpreviously or illustrated in an antecedent drawing are marked with likereference numerals, and a detailed description is omitted asappropriate.

First Embodiment

FIG. 1A and FIG. 1B are schematic cross-sectional views illustrating asemiconductor device according to a first embodiment.

As shown in FIG. 1A, the semiconductor device 110 according to theembodiment includes a first electrode 51, a second electrode 52, a thirdelectrode 53, a first nitride region 10, a second nitride region 20, athird nitride region 30, a first insulating film 41, and a secondinsulating film 42.

The first nitride region 10 includes Al_(x1)Ga_(1−x1)N (0≤x1<1). Thecomposition ratio x1 of Al is, for example, not less than 0 and not morethan 0.05. The first nitride region 10 includes, for example, GaN. Thefirst nitride region 10 is, for example, a semiconductor region. Thefirst nitride region 10 includes, for example, a crystal.

The first nitride region 10 includes, for example, first to fifthpartial regions 11 to 15. The third partial region 13 is between thefirst partial region 11 and the second partial region 12. The fourthpartial region 14 is between the first partial region 11 and the thirdpartial region 13. The fifth partial region is between the third partialregion 13 and the second partial region 12. For example, the first tofifth partial regions 11 to 15 are continuous with each other.

A first direction from the first partial region 11 toward the firstelectrode 51 crosses a second direction from the first electrode 51toward the second electrode 52.

The second direction is, for example, an X-axis direction. One directionperpendicular to the X-axis direction is taken as a Z-axis direction. Adirection perpendicular to the X-axis direction and the Z-axis directionis taken as a Y-axis direction.

The first direction is, for example, the Z-axis direction.

The direction from the second partial region 12 toward the secondelectrode 52 is aligned with the first direction (e.g., the Z-axisdirection).

The second nitride region 20 includes Al_(x2)Ga_(1−x2)N (0<x2≤1 andx1<x2). The second nitride region 20 includes AlGaN. For example, thecomposition ratio x2 of Al is not less than 0.05 and not more than 0.3.In one example, the second nitride region 20 includes, for example,Al_(0.3)Ga_(0.7)N. The second nitride region 20 is, for example, asemiconductor region. The second nitride region 20 includes, forexample, a crystal.

The second nitride region 20 includes a sixth partial region 26 and aseventh partial region 27. The direction from the fourth partial region14 toward the sixth partial region 26 is aligned with the firstdirection (e.g., the Z-axis direction). The direction from the fifthpartial region 15 toward the seventh partial region 27 is aligned withthe first direction.

The direction from the third partial region 13 toward the thirdelectrode 53 is aligned with the first direction (e.g., the Z-axisdirection). At least a portion of the third electrode 53 is between thesixth partial region 26 and the seventh partial region 27 in the seconddirection (the X-axis direction).

The first insulating film 41 includes a first insulating region 41 a anda second insulating region 41 b. The first insulating film 41 includessilicon and nitrogen. In one example, the first insulating film 41includes SiN.

The third nitride region 30 includes Al_(x3)Ga_(1−x3)N (0<x3≤1 andx1<x3). For example, the composition ratio x3 of Al in the third nitrideregion 30 is higher than the composition ratio x2 of Al in the secondnitride region 20. In one example, the composition ratio x3 of Al is,for example, greater than 0.3 and not more than 1. For example, thethird nitride region 30 includes, for example, AlN. The third nitrideregion 30 is, for example, a semiconductor region. As described below,the crystallinity of the third nitride region 30 may be different bylocation.

The third nitride region 30 includes first to seventh portions p1 to p7.The first portion p1 is between the third electrode 53 and the thirdpartial region 13 in the first direction (e.g., the Z-axis direction).The second portion p2 is between the third electrode 53 and the fourthpartial region 14 in the second direction (the X-axis direction). Thethird portion p3 is between the third electrode 53 and the fifth partialregion 15 in the second direction (the X-axis direction). The fourthportion p4 is between the third electrode 53 and the sixth partialregion 26 in the second direction (the X-axis direction). The fifthportion p5 is between the third electrode 53 and the seventh partialregion 27 in the second direction (the X-axis direction). The firstinsulating region 41 a is between the sixth portion p6 and the sixthpartial region 26. The second insulating region 41 b is between theseventh portion p7 and the seventh partial region 27. For example, thefirst to seventh portions p1 to p7 are continuous with each other.

The second insulating film 42 includes silicon and oxygen. The secondinsulating film 42 includes, for example, silicon oxide. The secondinsulating film 42 includes, for example, SiO₂. In one example, thesecond insulating film 42 does not include nitrogen. For example, theconcentration of nitrogen included in the second insulating film 42 maybe lower than the concentration of nitrogen included in the firstinsulating film 41.

The second insulating film 42 includes third to seventh insulatingregions 42 c to 42 g. The third insulating region 42 c is between thefirst portion p1 and the third electrode 53 in the first direction(e.g., the Z-axis direction). The fourth insulating region 42 d isbetween the fourth portion p4 and the third electrode 53 in the seconddirection (the X-axis direction). The fifth insulating region 42 e isbetween the fifth portion p5 and the third electrode 53 in the seconddirection (the X-axis direction). The sixth portion p6 is between thesixth insulating region 42 f and the first insulating region 41 a in thefirst direction (e.g., the Z-axis direction). The seventh portion p7 isbetween the seventh insulating region 42 g and the second insulatingregion 41 b in the first direction (e.g., the Z-axis direction).

The second insulating film 42 may further include an eighth insulatingregion 42 h and a ninth insulating region 42 i. The eighth insulatingregion 42 h is between the fourth portion p4 and the third electrode 53in the second direction (the X-axis direction). The ninth insulatingregion 42 i is between the fifth portion p5 and the third electrode 53.

For example, the first nitride region 10 and the second nitride region20 are included in a stacked body 18. For example, the stacked body 18is provided on a base body 10 s. For example, a buffer layer 17 isformed on the base body 10 s. The first nitride region 10 is epitaxiallygrown on the buffer layer 17. The second nitride region 20 isepitaxially grown on the first nitride region 10. The first insulatingfilm 41 is formed on the second nitride region 20. The stacked body 18may include the first insulating film 41. For example, a recess (arecess or a trench) is formed by removing a portion of the stacked body18 via the opening of the first insulating film 41. The bottom portionof the recess is positioned inside the first nitride region 10. Thethird nitride region 30 is provided at the bottom surface of the recess(a portion of the first nitride region 10), at the side surface of therecess (a portion of the first nitride region 10 and a portion of thesecond nitride region 20), and at the surface (e.g., the upper surface)of the stacked body 18. For example, at least a portion of the thirdnitride region 30 is epitaxially grown. The third nitride region 30 is,for example, a regrowth layer. The second insulating film 42 is formedafter the formation of the third nitride region 30. For example, thefirst to third electrodes 51 to 53 are formed. The semiconductor device110 is obtained thereby.

The first electrode 51 functions as, for example, a source electrode.The second electrode 52 functions as, for example, a drain electrode.The third electrode 53 functions as, for example, a gate electrode. Thesecond insulating film 42 functions as, for example, a gate insulatingfilm. The first insulating film 41 functions as, for example, aprotective film. For example, the current (the drain current) that flowsbetween the first electrode 51 and the second electrode 52 can becontrolled by the potential (e.g., the gate voltage) of the thirdelectrode 53. For example, the gate voltage is the potential of thethird electrode 53 referenced to the potential of the first electrode51.

For example, a two-dimensional electron gas 10E is generated at, forexample, a portion of the first nitride region 10 on the second nitrideregion 20 side. The two-dimensional electron gas 10E is used as acarrier region. The semiconductor device 110 is, for example, a HEMT(High Electron Mobility Transistor).

In the semiconductor device 110 according to the embodiment, the firstportion p1 of the third nitride region 30 is provided between the thirdelectrode 53 and the third partial region 13 in the Z-axis direction.For example, a two-dimensional electron gas 10F is formed in a portionof the first partial region 11 on the first portion p1 side. Thereby,for example, a high channel mobility is obtained.

In the embodiment, the third nitride region 30 includes side surfaceportions (e.g., second to fifth portions p2 to p5) of the recess andportions (the sixth portion p6 and the seventh portion p7) on the secondnitride region 20 in addition to the first portion p1 on the thirdpartial region 13 (e.g., GaN). These portions are continuous. Byproviding such a third nitride region 30, for example, goodcrystallinity is obtained easily in the first portion p1. Thereby, forexample, the two-dimensional electron gas 10F can be formed stably. Ahigher channel mobility is obtained stably thereby. According to theembodiment, a semiconductor device can be provided in which thecharacteristics can be improved stably.

The first insulating film 41 is provided in the embodiment. The uppersurface of the second nitride region 20 is protected by the firstinsulating film 41 when forming the recess. The degradation of thesecond nitride region 20 can be suppressed.

In the embodiment, the first portion p1 of the third nitride region 30is provided on the third partial region 13 of the first nitride region10. Thereby, for example, good crystallinity is obtained easily in thefirst portion p1.

On the other hand, the sixth portion p6 of the third nitride region 30is provided on the first insulating region 41 a of the first insulatingfilm 41. The seventh portion p7 of the third nitride region 30 isprovided on the second insulating region 41 b of the first insulatingfilm 41. Thus, the foundation is different between the first portion p1and the sixth portion p6. The foundation is different between the firstportion p1 and the seventh portion p7. Therefore, the crystallinity,etc., may be different between these portions.

FIG. 2A to FIG. 2C are schematic views illustrating the semiconductordevice according to the first embodiment. FIG. 2A and FIG. 2B are STEM(Scanning Transmission Electron Microscope) images of the semiconductordevice 110. FIG. 2A corresponds to a region including the first portionp1. FIG. 2B corresponds to a region including the second portion p2, thefourth portion p4, and the sixth portion p6. FIG. 2C shows therelationship between the region shown in FIG. 2A and the regions (thenitride regions, etc.) included in the semiconductor device 110.

FIG. 3A to FIG. 3D illustrate X-ray diffraction pattern images of thesemiconductor device according to the first embodiment.

FIG. 3A to FIG. 3D correspond respectively to the first portion p1, thesecond portion p2, the fourth portion p4, and the sixth portion p6.

It can be seen from FIG. 2A, FIG. 2B, and FIG. 3A to FIG. 3D that thecrystallinities of the multiple regions included in the third nitrideregion 30 are different from each other. For example, the crystallinityof the first portion p1 is higher than the crystallinity of the sixthportion p6. The crystallinity of the first portion p1 is higher than thecrystallinity of the seventh portion p7. For example, a high channelmobility is obtained easily because the crystallinity of the firstportion p1 is high.

For example, at least a portion of the first portion p1 includes acrystal. At least a portion of the sixth portion p6 may be amorphous. Atleast a portion of the seventh portion p7 may be amorphous.

The side surface portion (e.g., the second portion p2) of the thirdnitride region 30 is formed on a nitride semiconductor. Therefore, thecrystallinity of this side surface portion is relatively high. Forexample, the crystallinity of the second portion p2 is higher than thecrystallinity of the sixth portion p6. For example, the crystallinity ofthe second portion p2 is higher than the crystallinity of the fourthportion p4. For example, the crystallinity of the third portion p3 ishigher than the crystallinity of the seventh portion p7. For example,the crystallinities of the first portion p1 and the second portion p2are higher than the crystallinities of the fourth portion p4 and thefifth portion p5.

The fourth portion p4 is formed on a nitride semiconductor. Therefore,the crystallinity of the fourth portion p4 is relatively high. Forexample, the crystallinity of the fourth portion p4 is higher than thecrystallinity of the sixth portion p6. For example, the crystallinity ofthe fifth portion p5 is higher than the crystallinity of the seventhportion p7.

In the embodiment, in the X-axis direction, the third electrode 53opposes a portion of the first nitride region 10 and opposes the secondnitride region 20. The third electrode 53 is, for example, a recessedgate electrode. For example, the two-dimensional electron gas 10E underthe second nitride region 20 is divided by the third electrode 53 andthe second insulating film 42 (the gate insulating film). Thereby, thethreshold voltage can be high; and it is easy to obtain normally-offcharacteristics stably.

From experiments by the inventor, it was found that the thresholdvoltage changes according to a gate length Lg and the depth of therecess recited above. An example of the experimental results will now bedescribed.

As shown in FIG. 1B, the third partial region 13 includes a firstsurface 10 fa opposing the first portion p1. The sixth partial region 26includes a second surface 20 fb opposing the first insulating region 41a. The first surface 10 fa corresponds to the bottom surface (the lowersurface) of the recess. The second surface 20 fb corresponds to theupper surface of the second nitride region 20.

The distance along the first direction (the Z-axis direction) betweenthe position along the first direction (the Z-axis direction) of thefirst surface 10 fa and the position along the first direction (theZ-axis direction) of the second surface 20 fb is taken as a distance d1.The distance d1 corresponds to the depth of the recess (the recessdepth).

As shown in FIG. 1B, the distance along the second direction (the X-axisdirection) between the first insulating region 41 a and the secondinsulating region 41 b is taken as a distance w1. The distance along thesecond direction (the X-axis direction) between the sixth partial region26 and the seventh partial region 27 is taken as a distance w2. Thedistance along the second direction (the X-axis direction) between thesecond portion p2 and the third portion p3 is taken as a distance w3. Inthe case where the side surface of the recess is perpendicular, thesedistances are substantially the same. For example, these distancescorrespond to the gate length Lg. These distances are large compared tothe differences between these distances due to the oblique side surface.Therefore, practically, any of these distances may be used as the gatelength Lg. Hereinbelow, the gate length Lg is the distance w2.

In the samples of the experiment, the first nitride region is GaN. Thesecond nitride region 20 is Al_(0.25)Ga_(0.75)N. The thickness (thelength in the Z-axis direction) of the second nitride region 20 is 30nm. The third nitride region 30 is AlN. The thickness of the thirdnitride region 30 (e.g., the length in the Z-axis direction of the firstportion p1) is 0.5 nm. The first insulating film 41 is SiN. Thethickness (the length in the Z-axis direction) of the first insulatingfilm 41 is 10 nm. The second insulating film 42 is SiO₂. The thicknessof the second insulating film 42 (e.g., the length in the Z-axisdirection of the third insulating region 42 c) is 30 nm. The first tothird electrodes 51 to 53 include TiN.

Multiple samples are made in which the depth of the recess (the distanced1) and the gate length Lg are modified. The threshold voltage and thechannel mobility are evaluated for these samples.

FIG. 4 and FIG. 5 are graphs illustrating characteristics of thesemiconductor device.

These drawings show the measurement results of the characteristics ofsamples in which the gate length Lg is 1 μm. In the samples, the channelwidth “Wg” is 20 μm. For example, “Wg” corresponds to the length in theY-axis direction of the mutually-opposing portions of the firstelectrode 51 and the second electrode 52. In these drawings, thehorizontal axis is the distance d1 (nm; the depth of the recess). Thevertical axis of FIG. 4 is a threshold voltage Vth (V). The thresholdvoltage Vth corresponds to a gate voltage at which the drain currentbecomes 1×10⁻⁶ A. In the example, “Id/Wg” is 5×10⁻⁴ A/mm when the draincurrent is 1×10⁻⁶ A, wherein “Id” is the drain current, and “Wg” is thechannel width Wg. The vertical axis of FIG. 5 is a channel mobility μ(cm²/Vs; the field effect mobility). The vertical axis of FIG. 5 is alogarithmic display.

It can be seen from FIG. 4 that the threshold voltage Vth is negativewhen the distance d1 (the depth of the recess) is short such as 15 nm.In such a case, a normally-on operation is obtained. The thresholdvoltage Vth increases and becomes positive as the distance d1 lengthens.In such a case, a normally-off operation is obtained. It can be seenfrom FIG. 4 that the threshold voltage Vth increases abruptly when thedistance d1 exceeds 50 nm. A high positive threshold voltage Vth isobtained when the distance d1 is 60 nm or more. It is favorable for thedistance d1 to be 80 nm or more. A high positive threshold voltage Vthis obtained stably. It is favorable for the distance d1 to be 100 nm ormore. A high positive threshold voltage Vth is obtained more stably.

In the embodiment, for example, as recited above, a direction crossing aplane including the first direction and the second direction is taken asthe third direction. The third direction is, for example, the Y-axisdirection. In such a case, the length along the third direction of theportion of one of the first electrode 51 or the second electrode 52opposing the other of the first electrode 51 or the second electrode 52is taken as Wg (meters). The current that flows between the firstelectrode 51 and the second electrode 52 is taken as Id (amperes). Inthe embodiment, the potential (e.g., the threshold voltage Vth) of thethird electrode 53 referenced to the potential of the first electrode 51is positive when Id/Wg is 5×10⁻⁴ A/mm. The potential of the thirdelectrode 53 referenced to the potential of the first electrode 51 ispositive when Id/Wg is 5×10⁻⁴ A/mm or more.

It can be seen from FIG. 5 that a high channel mobility is obtained whenthe distance d1 (the depth of the recess) is short such as 15 nm.However, in such a case, the threshold voltage Vth is negative asdescribed in reference to FIG. 4 .

On the other hand, as shown in FIG. 5 , the channel mobility μsubstantially does not change in the range in which the distance d1 is60 nm to 300 nm.

In the embodiment, it is favorable for the distance d1 to be 60 nm ormore. Thereby, a high positive threshold voltage Vth and a relativelyhigh and stable channel mobility μ are obtained.

In the example recited above, the thickness of the second nitride region20 is 30 nm. In the embodiment, it is favorable for the distance d1 tobe not less than 2 times the thickness of the second nitride region 20.It is favorable for the distance d1 to be not less than 2.5 times thethickness of the second nitride region 20. It is more favorable for thedistance d1 to be not less than 3 times the thickness of the secondnitride region 20. It is more favorable for the distance d1 to be notless than 3.3 times the thickness of the second nitride region 20.

An example of measurement results of the threshold voltage Vth will nowbe described for samples in which the gate length Lg is changed.

FIG. 6A to FIG. 6D are graphs illustrating characteristics of thesemiconductor device.

In these drawings, the horizontal axis is the gate length Lg (μm). Thevertical axis is the threshold voltage Vth. FIG. 6A to FIG. 6Dcorrespond respectively to the results when the distance d1 is 45 nm,100 nm, 120 nm, and 160 nm.

In the case where the distance d1 is 45 nm as shown in FIG. 6A, thethreshold voltage Vth decreases as the gate length Lg decreases. It isconsidered that this corresponds to a phenomenon generally known as a“short-channel effect.” On the other hand, in the case where thedistance d1 is 100 nm, 120 nm, and 160 nm as shown in FIG. 6B to FIG.6D, the threshold voltage Vth increases as the gate length Lg decreasesin the range in which the gate length Lg is 1 μm to 3 μm. Such aphenomenon is conventionally-unknown. It is considered that thisphenomenon occurs uniquely when the distance d1 (the depth of therecess) is long.

In the embodiment, it is more favorable for the gate length Lg to be 3μm or less. Thereby, for example, a high threshold voltage Vth isobtained easily.

In the embodiment, it is favorable for the impurity to be low at thebottom portion of the recess. For example, the formation of the recessis performed by dry etching using a gas including, for example, at leastone selected from the group consisting of BCl₃ and Cl₂. For example,there are cases where the channel mobility μ may decrease if the elementincluded in the gas remains in the third partial region 13. For example,the concentration of the element included in the gas may be reduced byperforming the heat treatment in an atmosphere of ammonia, etc., afterthe formation of the recess.

For example, the third partial region 13 includes a region including thefirst surface 10 fa (referring to FIG. 1B) opposing the first portionp1. The concentration of boron in this region including the firstsurface 10 fa is, for example, 1×10¹⁸ atoms/cm³ or less. Theconcentration of boron in the region including the first surface 10 fais, for example, about 9×10¹⁷ atoms/cm³. The concentration of boron inthe region including the first surface 10 fa is, for example, 1×10¹⁶atoms/cm³ or more.

The concentration of chlorine in the region including the first surface10 fa is, for example, 1×10¹⁶ atoms/cm³ or less. The concentration ofchlorine in the region including the first surface 10 fa is, forexample, about 4×10¹⁸ atoms/cm³. The concentration of chlorine in theregion including the first surface 10 fa is, for example, not less thanabout 1×10¹⁸ atoms/cm³.

It is favorable for the first surface 10 fa to be flat. For example, theflatness of the first surface 10 fa is improved by performing the heattreatment in an atmosphere of the ammonia, etc., after the formation ofthe recess. For example, the surface roughness (e.g., the root meansquare RMS) of the first surface 10 fa is 1 nm or less. The surfaceroughness of the first surface 10 fa is, for example, about 202 pm.

The surface of the first surface 10 fa (the surface of the third partialregion 13) is relatively flat (referring to FIG. 2A). The surface of thefirst portion p1 of the third nitride region 30 also is relatively flat(referring to FIG. 2A). On the other hand, the unevenness of the surfaceof the side surface portion (e.g., the fourth portion p4, etc.) of thethird nitride region 30 is larger than the unevenness of the surface ofthe first portion p1.

Second Embodiment

A second embodiment relates to a method for manufacturing asemiconductor device.

FIG. 7 is a flowchart illustrating the method for manufacturing thesemiconductor device according to the second embodiment.

The stacked body 18 is prepared as shown in FIG. 7 (step S110). Thestacked body 18 includes the first nitride region 10 includingAl_(x1)Ga_(1−x1)N (0≤x1<1), the second nitride region 20 includingAl_(x2)Ga_(1−x2)N (0<x2≤1 and x1<x2), and the first insulating film 41.The second nitride region 20 is provided between the first nitrideregion 10 and the first insulating film 41.

A recess is formed in the stacked body 18 by removing a portion of thestacked body 18 from the first insulating film 41 side (step S120).Also, a portion of the first nitride region 10 is exposed at the bottomportion of the recess.

The third nitride region 30 that includes Al_(x3)Ga_(1−x3)N (0<x3≤1 andx1<x3) is formed (step S130). The third nitride region 30 is formed atthe first insulating film 41, at the side surface of the second nitrideregion 20, and at the first nitride region 10 exposed at the bottomportion of the recess.

The second insulating film 42 is formed after the formation of the thirdnitride region 30 (step S140).

The electrodes (the first to third electrodes 51 to 53) are formed (stepS150). For example, step S150 is performed after the formation of thesecond insulating film 42 (step S140). The second direction (the X-axisdirection) from the first electrode 51 toward the second electrode 52crosses the first direction (e.g., the Z-axis direction) from the firstnitride region 10 toward the second nitride region 20. The position inthe second direction of the third electrode 53 is between the positionin the second direction of the first electrode 51 and the position inthe second direction of the second electrode 52. At least a portion ofthe third electrode 53 is in the remaining space of the recess.

An example of the method for manufacturing the semiconductor device 110according to the embodiment will now be described.

FIG. 8A to FIG. 8D and FIG. 9A to FIG. 9D are schematic cross-sectionalviews in order of the processes, illustrating the method formanufacturing the semiconductor device according to the secondembodiment. The buffer layer 17 is not illustrated in these drawings.

As shown in FIG. 8A, the first nitride region 10 is provided on the basebody 10 s. The second nitride region 20 is provided on the first nitrideregion 10. The base body 10 s is, for example, a silicon substrate.

As shown in FIG. 8B, the first insulating film 41 is provided on thesecond nitride region 20. The stacked body 18 is obtained.

As shown in FIG. 8C, a mask film 45 that has a prescribed opening isformed on the first insulating film 41.

As shown in FIG. 8D, a portion of the first insulating film 41 isremoved using the mask film 45 as a mask. An opening 410 is formed inthe first insulating film 41 thereby.

As shown in FIG. 9A, a portion of the stacked body 18 is removed usingthe first insulating film 41 as a mask. A recess 18 r is formed in thestacked body 18 (step S120). A portion of the first nitride region 10 isexposed at a bottom portion 18 b of the recess 18 r.

At this time, the depth of the recess 18 r corresponds to the distanced1 in the Z-axis direction between the bottom portion 18 b and the uppersurface of the second nitride region 20. It is favorable for thedistance d1 to be, for example, 60 nm or more. It is favorable for thedistance d1 to be, for example, not less than 2 times the thickness ofthe second nitride region 20.

The third nitride region 30 is formed as shown in FIG. 9B (step S130).The third nitride region 30 is formed at the upper surface of the firstinsulating film 41, at a side surface 20 s of the second nitride region20, and at the first nitride region 10 exposed at the bottom portion 18b of the recess 18 r.

The second insulating film 42 is formed as shown in FIG. 9C.

The first to third electrodes 51 to 53 are formed as shown in FIG. 9D.The second direction (the X-axis direction) from the first electrode 51toward the second electrode 52 crosses the first direction (the Z-axisdirection) from the first nitride region 10 toward the second nitrideregion 20. The position in the second direction of the third electrode53 is between the position in the second direction of the firstelectrode 51 and the position in the second direction of the secondelectrode 52. At least a portion of the third electrode 53 is in theremaining space of the recess 18 r. The third electrode 53 opposes thefirst nitride region 10 in the second direction (the X-axis direction).

In the manufacturing method recited above, the third nitride region 30is formed at the upper surface of the first insulating film 41, at theside surface 20 s of the second nitride region 20, and at the firstnitride region 10 exposed at the bottom portion 18 b of the recess 18 r.Good crystallinity is obtained in the first portion p1 of the thirdnitride region 30 (referring to FIG. 1A). By forming the recess 18 r byusing the first insulating film 41, the damage of the second nitrideregion 20 is low. The third nitride region 30 is protected by formingthe second insulating film 42 to cover the third nitride region 30.

According to the embodiments, a semiconductor device and a method formanufacturing the semiconductor device can be provided in which thecharacteristics can be improved stably.

In the embodiments, it is favorable for the third nitride region 30 tobe formed by atomic layer deposition (ALD). Thereby, for example, thethird nitride region 30 can be formed uniformly even at the recess 18 r.

The first insulating film 41 includes, for example, silicon andnitrogen. The second insulating film 42 includes, for example, siliconand oxygen. The second insulating film 42 does not include nitrogen. Or,the concentration of nitrogen included in the second insulating film 42is lower than the concentration of nitrogen included in the firstinsulating film 41. For example, the second nitride region 20 isprotected by the first insulating film 41. For example, stablecharacteristics are obtained when the second insulating film 42functions as the gate insulating film.

Heat treatment of the first nitride region 10 exposed at the bottomportion 18 b of the recess 18 r may be performed before the formation ofthe third nitride region 30 (step S130). For example, the heat treatmentis performed in an atmosphere including ammonia. Thereby, for example,the element that is included in the gas used when forming the recess 18r is removed. For example, the flatness of the surface of the bottomportion 18 b (the first surface 10 fa) improves.

According to the embodiments, a semiconductor device and a method formanufacturing the semiconductor device can be provided in which thecharacteristics can be improved stably.

In the specification of the application, “perpendicular” and “parallel”refer to not only strictly perpendicular and strictly parallel but alsoinclude, for example, the fluctuation due to manufacturing processes,etc. It is sufficient to be substantially perpendicular andsubstantially parallel.

Hereinabove, exemplary embodiments of the invention are described withreference to specific examples. However, the embodiments of theinvention are not limited to these specific examples. For example, oneskilled in the art may similarly practice the invention by appropriatelyselecting specific configurations of components included insemiconductor devices such as nitride regions, electrodes, insulatinglayers, etc., from known art. Such practice is included in the scope ofthe invention to the extent that similar effects thereto are obtained.

Further, any two or more components of the specific examples may becombined within the extent of technical feasibility and are included inthe scope of the invention to the extent that the purport of theinvention is included.

Moreover, all semiconductor devices, and methods for manufacturing thesame practicable by an appropriate design modification by one skilled inthe art based on the semiconductor devices, and the methods formanufacturing the same described above as embodiments of the inventionalso are within the scope of the invention to the extent that thepurport of the invention is included.

Various other variations and modifications can be conceived by thoseskilled in the art within the spirit of the invention, and it isunderstood that such variations and modifications are also encompassedwithin the scope of the invention.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the invention.

What is claimed is:
 1. A semiconductor device, comprising: a firstelectrode; a second electrode; a first nitride region includingAl_(x1)Ga_(1−x1)N (0≤1<1) and including a first partial region, a secondpartial region, a third partial region between the first partial regionand the second partial region, a fourth partial region between the firstpartial region and the third partial region, and a fifth partial regionbetween the third partial region and the second partial region, a firstdirection from the first partial region toward the first electrodecrossing a second direction from the first electrode toward the secondelectrode, a direction from the second partial region toward the secondelectrode being aligned with the first direction; a second nitrideregion including Al_(x2)Ga_(1−x2)N (0<x2≤1 and x1<x2) and including asixth partial region and a seventh partial region, a direction from thefourth partial region toward the sixth partial region being aligned withthe first direction, a direction from the fifth partial region towardthe seventh partial region being aligned with the first direction; athird electrode, a direction from the third partial region toward thethird electrode being aligned with the first direction, at least a,portion of the third electrode being between the sixth partial regionand the seventh partial region in the second direction; a firstinsulating film including a first insulating region and a secondinsulating region; a third nitride region including Al_(x3)Ga_(1−x3)N(0<x31 and x1<x3) and including first to seventh portions, the firstportion being between the third electrode and the third partial region,the second portion being between the third electrode and the fourthpartial region, the third portion being between the third electrode andthe fifth partial region; the fourth portion being between the thirdelectrode and the sixth partial region, the fifth portion being betweenthe third electrode and the seventh partial region, the first insulatingregion being between the sixth portion and the sixth partial region, thesecond insulating region being between the seventh portion and theseventh partial region; and a second insulating film including includingthird to seventh insulating regions, the third insulating region beingbetween the first portion and the third electrode, the fourth insulatingregion being between the fourth portion and the third electrode, thefifth insulating region being between the fifth portion and the thirdelectrode, the sixth portion being between the sixth insulating regionand the first insulating region, the seventh portion being between theseventh insulating region and the second insulating region, wherein acrystallinity of the first portion is higher than a crystallinity of thesixth portion.
 2. The device according to claim 1, wherein at least aportion of the first portion includes a crystal, and at least a portionof the sixth portion is amorphous.
 3. The device according to claim 1,wherein a crystallinity of the second portion is higher than acrystallinity of the sixth portion.
 4. The device according to claim 1,wherein a crystallinity of the fourth portion is higher than acrystallinity of the sixth portion.
 5. The device according to claim 1,wherein the second insulating film further includes an eighth insulatingregion and a ninth insulating region, the eighth insulating region isbetween the fourth portion and the third electrode, and the ninthinsulating region is between the fifth portion and the third electrode.6. The device according to claim 1, wherein the second insulating filmdoes not include nitrogen, or a concentration of nitrogen included inthe second insulating film is lower ti concentration of nitrogenincluded in the first insulating film.
 7. The device according to claim1, wherein the third partial region includes a first surface opposingthe first portion, the sixth partial region includes a second surfaceopposing the first insulating region, and a distance along the firstdirection between a position along the first direction of the firstsurface and a position along the first direction of the second surfaceis 60 n T1 or more.
 8. The device according to claim 1, wherein thethird partial region includes a region including a first surfaceopposing the first portion, and a concentration of boron in the regionincluding the first surface is 1×10¹⁸ atoms/cm³ or less.
 9. The deviceaccording to claim 1, wherein the third partial region includes a regionincluding a first surface opposing the first portion, and aconcentration of chlorine in the region including the first surface is1×10¹⁶ atoms/cm³ or less.
 10. The device according to claim 1, whereinthe third partial region includes a first surface opposing the firstportion, and a surface roughness of the first surface is 1 nm or less.11. The device according to claim 1, wherein a distance along the seconddirection between the first insulating region and the second insulatingregion is 3 μm or less.
 12. The device according to claim 1, wherein adistance along the second direction between the sixth partial region andthe seventh partial region is 3 μm or less.
 13. The device according toclaim 1, wherein x3 is higher than x2.
 14. The device according to claim1, wherein x1 is not less than 0 and not more than 0.05, x2 is not lessthan 0.05 and not more than 0.3, and x3 is greater than 0.3 and not morethan
 1. 15. The device according to claim 1, wherein a potential of thethird electrode referenced to a potential of the first electrode ispositive when Id/Wg is 5×10⁻⁴ A/mm, a third direction is a directioncrossing a plane including the first direction and the second direction,Wg (meters) is a length along the third direction of a portion of one ofthe first electrode or the second electrode opposing the other of thefirst electrode or the second electrode, and Id (amperes) is a currentflowing between the first electrode and the second electrode.
 16. Asemiconductor device, comprising: a first electrode; a second electrode;a first nitride region including Al_(x1)Ga_(1−x1)N (0≤x1<1) andincluding a first partial region, a second partial region, a thirdpartial region between the first partial region and the second partialregion, a fourth partial region between the first partial region and thethird partial region, and a fifth partial region between the thirdpartial region and the second partial region, a first direction from thefirst partial region toward the first electrode crossing a seconddirection from the first electrode toward the second electrode, adirection from the second partial region toward the second electrodebeing aligned with the first direction; a second nitride regionincluding Al_(x2)Ga_(1−x2)N (0<x2≤1 and x1<x2) and including a sixthpartial region and a seventh partial region, a direction from the fourthpartial region toward the sixth partial region being aligned with thefirst direction, a direction from the fifth partial region toward theseventh partial region being aligned with the first direction; a thirdelectrode, a direction from the third partial region toward the thirdelectrode being aligned with the first direction, at least a portion ofthe third electrode being between the sixth partial region and theseventh partial region in the second direction; a first insulating filmincluding a first insulating region and a second insulating region; athird nitride region including Al_(x3)Ga_(1−x3)N (0<x3≤1 and x1<x3) andincluding first to seventh portions, the first portion being between thethird electrode and the third partial region, the second portion beingbetween the third electrode and the fourth partial region, the thirdportion being between the third electrode and the fifth partial region,the fourth portion being between the third electrode and the sixthpartial region, the fifth portion being between the third electrode andthe seventh partial region, the first insulating region being betweenthe sixth portion and the sixth partial region, the second insulatingregion being between the seventh portion and the seventh partial region;and a second insulating film including third to seventh insulatingregions, the third insulating region being between the first portion andthe third electrode, the fourth insulating region being between thefourth portion and the third electrode, the fifth insulating regionbeing between the fifth portion and the third electrode, the sixthportion being between the sixth insulating region and the firstinsulating region, the seventh portion being between the seventhinsulating region and the second insulating region, wherein the thirdpartial region includes a region including a first surface opposing thefirst portion, and a concentration of boron in the region including thefirst surface is 1×10¹⁸ atoms/cm³ or less.
 17. The device according toclaim 16, wherein the third partial region includes a first surfaceopposing the first portion, the sixth partial region includes a secondsurface opposing the first insulating region, and a distance along thefirst direction between a position along the first direction of thefirst surface and a position along the first direction of the secondsurface is 60 nm or more.
 18. The device according to claim 16, whereina distance along the second direction between the first insulatingregion and the second insulating region is 3 μm or less.
 19. Asemiconductor device, comprising: a first electrode; a second electrode;a first nitride region including Al_(x1)Ga_(1−x1)N (0≤x1<1) andincluding a first partial region, a second partial region, a thirdpartial region between the first partial region and the second partialregion, a fourth partial region between the first partial region and thethird partial region, and a fifth partial region between the thirdpartial region and the second partial region, a first direction from thefirst partial region toward the first electrode crossing a seconddirection from the first electrode toward the second electrode, adirection from the second partial region toward the second electrodebeing aligned with the first direction; a second nitride regionincluding Al_(x2)Ga_(1−x2)N (0<x2≤1 and x1<x2) and including a sixthpartial region and a seventh partial region, a direction from the fourthpartial region toward the sixth partial region being aligned with thefirst direction, a direction from the fifth partial region toward theseventh partial region being aligned with the first direction; a thirdelectrode, a direction from the third partial region toward the thirdelectrode being aligned with the first direction, at least a portion ofthe third electrode being between the sixth partial region and theseventh partial region in the second direction; a first insulating filmincluding a first insulating region and a second insulating region; athird nitride region including Al_(x3)Ga_(1−x3)N (0<x3≤1 and x1<x3) andincluding first to seventh portions, the first portion being between thethird electrode and the third partial region, the second portion beingbetween the third electrode and the fourth partial region, the thirdportion being between the third electrode and the fifth partial region,the fourth portion being between the third electrode and the sixthpartial region, the fifth portion being between the third electrode andthe seventh partial region, the first insulating region being betweenthe sixth portion and the sixth partial region, the second insulatingregion being between the seventh portion and the seventh partial region;and a second insulating film including third to seventh insulatingregions, the third insulating region being between the first portion andthe third electrode, the fourth insulating region being between thefourth portion and the third electrode, the fifth insulating regionbeing between the fifth portion and the third electrode, the sixthportion being between the sixth insulating region and the firstinsulating region, the seventh portion being between the seventhinsulating region and the second insulating region, wherein the thirdpartial region includes a region including a first surface opposing thefirst portion, and a concentration of chlorine in the region includingthe first surface is 1×10¹⁶ atoms/cm³ or less.
 20. The device accordingto claim 19, wherein the third partial region includes a first surfaceopposing the first portion, the sixth partial region includes a secondsurface opposing the first insulating region, and a distance along thefirst direction between a position along the first direction of thefirst surface and a position along the first direction of the secondsurface is 60 nm or more.